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Semiconductor FMCS Reference Guide

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This document provides a reference guide for a Facility Monitoring and Control System (FMCS) tailored to the semiconductor industry, focusing on SCADA, control level, and communication network components. It outlines an Integrated Automation System (IAS) architecture leveraging AVEVA Operations Control and Modicon ePAC, intended to help system integrators and fab teams with efficient engineering, deployment, and maintenance.

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