VHX Series Digital Microscope Contamination Measurement Guide

This document discusses the automation of contamination (particle) measurement using digital microscopy, highlighting the challenges of time-consuming manual inspection and overlooked items. It presents KEYENCE’s VHX Series as a solution, offering high-speed, high-resolution image stitching, a 20× larger depth-of-field, and the ability to measure particles as small as 1 μm in accordance with ISO 16232 standards.